Work

Optimal nitrogen composition of hafnium nitride thin films for field-emitter array applications

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0005742

Authors: Tomoaki Osumi, Yasuhito Gotoh

Institution: Kyoto Katsura Hospital

Language: English

Topic: Photocathodes and Microchannel Plates

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7223173641

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Cites: 60

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