Work

A study on experimental demonstration of CMOS–MEMS PiezoMOS force sensors integrated with current-mirror readout circuitry

Year: 2026

Type: article

Source: Sensor Review

DOI: 10.1108/sr-06-2026-0654

Authors: Menuvolu Tetseo, Shashi Kumar, Kalpana Gogoi, Gaurav Kumar, Shravan Kumar Bandari, Pradeep Kumar Rathore

Institutions: National Institute of Technology Meghalaya, Indian Institute of Technology Bombay

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7223690252

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Cites: 36

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Related to: 10