Work

Cyclic Wet Etch Method to Improve Nanoconfined Wet Etching

Year: 2026

Type: article

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/p-now9sy

Authors: Sangita Kumari, Shan Hu, Kathikeyan Pillai, Osamu Miyahara

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7224167880

FWCI:

Cites: 6

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Related to: 10