Work

Volume of Fluid Modeling of a Rotating Disk Edge Wetting with Backside Dispenser

Year: 2026

Type: article

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/p-hz736r

Authors: Alberto Ceschin, Naser Belmiloud, Karim Huet, Masanobu Sato

Institution: SCREEN Semiconductor Solutions Co., Ltd. (Japan)

Language: English

Topic: Fluid Dynamics and Thin Films

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7224434943

FWCI:

Cites: 6

Cited by:

Related to: 10