Work

Correlation between Flying Droplet Characteristics and Surface Potential of SiO2 Wafers during Two-Fluid Spray Cleaning

Year: 2026

Type: article

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/p-7gxdj9

Authors: Yoshiyuki Seike, Kousei Ito, Yusuke Ichino, Noriyuki Taoka, Tatsuo Mori

Institution: Aichi Institute of Technology

Language: English

Topic: Electrostatic Discharge in Electronics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7224465428

FWCI:

Cites: 7

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Related to: 10