Work

Synergistic Effects of Surfactants on Ceria Removal Efficiency during SC1-based Post-CMP Cleaning

Year: 2026

Type: article

Abstract: This study aims to enhance SC1-based post-CMP cleaning efficiency by evaluating various surfactants for effective CeO2 particle removal from SiO2 surfaces. Among the tested surfactants, Sarkosyl NL demonstrated superior performance, achieving a removal efficiency of 97.85%. Its anionic nature promotes electrostatic repulsion, preventing particle redeposition, while its thermal stability ensures consistent cleaning efficiency even under prolonged heating. Effective micelle formation further enhances particle dispersion. These findings highlight the potential of Sarkosyl NL to improve SC1-based cleaning processes, offering valuable insights for optimizing surfactant formulations to achieve higher particle removal efficiency and surface cleanliness in semiconductor manufacturing.

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/p-be1q2y

Authors: Ju Yong Lee, Chulwoo Bae, Jungjae Park, Jongjin Kim, Taesung Kim

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W4411174418

FWCI:

Cites: 29

Cited by:

Related to: 10