Work

Selective Wet Etching of SiO2 through Fluorine Species Control

Year: 2026

Type: article

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/p-l2yoq9

Authors: Bumsik Kim, Sang Woo Lim

Institution: Yonsei University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7224579213

FWCI:

Cites: 8

Cited by:

Related to: 10