Work

Air-annealing-induced vertical elemental gradients regulate defect chemistry and optoelectronic properties of cylindrical-target-sputtered ITO thin films

Year: 2026

Type: article

Abstract: , and an average visible transmittance of 89.8%. Excessive annealing causes oxygen-vacancy overcompensation and enhanced interfacial diffusion, which deteriorate electrical transport despite slightly higher optical transmittance. These results demonstrate that air annealing can construct an optimized gradient balance that reconciles conductivity and transparency in cylindrical-target-sputtered ITO films.

Source: RSC Advances

DOI: 10.1039/d6ra07982b

Authors: Bingsen Shi, Shicheng Huang, Man Mo, Zhijie Fang

Institution: Guangxi University of Science and Technology

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $1,042