Work

Composition-Dependent Atomic Layer Etching of Multicomponent Oxide Semiconductors with Preserved Electrical Performance

Year: 2026

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.6c16962

Authors: Min Chan Kim, Min-seo Kim, Hyeseong Lee, Hae Lin Yang, Jinho Ahn, Jin-Seong Park

Institution: Hanyang University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7225251333

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Cites: 38

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