Work

Low-Thermal-Budget Ferroelectric Hf1– x Zr x O2: Crystallization Pathways, Phase Selection, and Process Design

Year: 2026

Type: article

Source: ACS Applied Electronic Materials

DOI: 10.1021/acsaelm.6c01858

Authors: Jeonggwang Lee, Heejin Hong, Hyun Woo Jeong, Jaewook Lee, Min Hyuk Park

Institution: Seoul National University

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Korea Institute of Science and Technology, National Research Foundation of Korea

OpenAlex ID: W7225395838

FWCI:

Cites: 96

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Related to: 10