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Disturbance Observer‐Based Fixed‐Time Super‐Twisting Sliding Mode Control for Vibration Isolation Platforms in Lithography Machines

Year: 2026

Type: article

Source: International Journal of Adaptive Control and Signal Processing

DOI: 10.1002/acs.70157

Authors: Shuaishuai Su, Kun Zhang, Mengyu Yang, Haiyang Zhao, Bing Wang, Yupu Wang, Sui Yang, Yong Yang

Institutions: Institute of Optics and Electronics, Chinese Academy of Sciences, University of Chinese Academy of Sciences

Language: English

Topic: Adaptive Control of Nonlinear Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7225627314

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Cites: 37

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