Work

A Low-Temperature Molten Alkali Etching Method for Rapid Defect Characterization in β-Ga2O3

Year: 2026

Type: article

Source: Semiconductor Science and Technology

DOI: 10.1088/1361-6641/aec0c6

Authors: Jiaxiang He, Yuchao Yan, Xinyu Yan, Xuan Peng, Hongpan Tang, Defan Wu, Zhu Jin, Ning Xia, Hui Zhang, Deren Yang

Institution: Zhejiang University

Language: English

Topic: Ga2O3 and related materials

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7225782627

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