Design and Simulation of CMUT Based on Graphene/Parylene-C Composite Membrane
Year: 2026
Type: preprint
Abstract: This paper proposes a capacitive micromachined ultrasonic transducer (CMUT) cell with a graphene/Parylene-C composite membrane, which takes full advantage of the excellent mechanical flexibility, low mass density and favorable electrical properties of the composite material to improve the electromechanical coupling efficiency and overall output performance of the ultrasonic transducer. A multi-physics finite-element model is established, and systematic parametric sweeps are carried out to investigate how key structural parameters including cavity radius, cavity height and membrane thickness influence the resonant frequency and dynamic vibration characteristics of the CMUT cell. According to the simulated results, optimal structural parameters are determined for the unit cell. On this basis, a CMUT phased array is designed targeting the operating resonant frequency of the optimized cell, and its acoustic directivity as well as beam-focusing performance are assessed via acoustic field numerical simulations. The simulation demonstrates that the developed composite-membrane CMUT phased array exhibits promising application potential for medical focused ultrasound imaging, and lays a simulation-driven foundation for the subsequent design and practical development of CMUT devices.
Source: Research Square
Institution: Southwest Jiaotong University
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W7225805064