Work

Partly Pd-covered nonevaporable getter films

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0005891

Authors: Xiuguang Jin, Takashi Uchiyama

Institution: High Energy Accelerator Research Organization

Language: English

Topic: Adsorption, diffusion, and thermodynamic properties of materials

Subfield: Physical and Theoretical Chemistry

Field: Chemistry

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7225807013

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Cites: 7

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