Work

Statistical Process Control for Semiconductor Manufacturing Processes

Year: 2010

Type: book-chapter

Source: Physica-Verlag eBooks

DOI: 10.1007/978-3-7908-2380-6_5

Authors: Masanobu Higashide, Ken Nishina, Hironobu Kawamura, Naru Ishii

Institutions: NEC (Japan), Nagoya Institute of Technology

Language: English

Topic: Advanced Statistical Process Monitoring

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W73318579

FWCI: 4.428

Cites: 6

Cited by: 8

Related to: 10