Work

Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

Year: 2009

Type: article

Source: Journal of Material Science and Technology

Authors: Jiaqi Zhu, Jiecai Han, Songhe Meng, Qiang Li, Manlin Tan

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W859318059

FWCI: 0.528

Cites:

Cited by: 1

Related to: 20