Work

Science and Technology of Ultrananocrystalline Diamond Films for Multifunctional Mems/nems Devices

Year: 2004

Type: article

Authors: Z. Chen, Horacio D. Espinosa, Mark C. Hersam, O. Auciello, Ted Belytschko, George C. Schatz

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W87517938

FWCI:

Cites: 3

Cited by:

Related to: 10