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A Study on Deposition of Tungsten Nitride Thin Film for X-ray mask(l)

Year: 1998

Type: article

Source: Korean Journal of Materials Research

Authors: Cheol-Min Jang, Byung-Ho Choi

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W930772059

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