A Load Balancing Method for Dedicated Photolithography Machine Constraint
Year: 2007
Type: conference-paper
Source: Springer eBooks
Authors: Arthur Shr, Alan Liu, Peter P. Chen
Institutions: National Chung Cheng University, Louisiana State University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W992289433
