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Author

Luigi Scaccabarozzi

Observed names: L. Scaccabarozzi, Scaccabarozzi, L.
Institution: ASML (Netherlands)
OpenAlex ID: A5000258139
Progress on EUV pellicle development
2014 · Carmen Zoldesi, Kursat Bal, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 87
Efficient continuous wave second harmonic generation pumped at 1.55 µm in quasi-phase-matched AlGaAs waveguides
2005 · X. Yu, L. Scaccabarozzi, et al. · Optics Express · 86
Enhanced second-harmonic generation in AlGaAs/Al_xO_y tightly confining waveguides and resonant cavities
2006 · Luigi Scaccabarozzi, M. M. Fejer, et al. · Optics Letters · 82
Investigation of EUV pellicle feasibility
2013 · Luigi Scaccabarozzi, Dan Smith, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 70
Growth of GaAs with orientation-patterned structures for nonlinear optics
2006 · Xiaojun Yu, Luigi Scaccabarozzi, et al. · Journal of Crystal Growth · 46
Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning
2008 · Jun Pan, Yijie Huo, et al. · Applied Physics Letters · 43
Template design and fabrication for low-loss orientation-patterned nonlinear AlGaAs waveguides pumped at 1.55μm
2003 · X. Yu, L. Scaccabarozzi, et al. · Journal of Crystal Growth · 15
Extreme ultraviolet induced defects on few-layer graphene
2013 · A. Gao, P. J. Rizo, et al. · Journal of Applied Physics · 12
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Particle Cleaning of EUV Reticles
2009 · Luigi Scaccabarozzi, Niels A. Lammers, et al. · Journal of Adhesion Science and Technology · 12
Grid-supported EUV pellicles: A theoretical investigation for added value
2015 · Florian Dhalluin, Laurens de Winter, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
Highly Efficient Birefringent Second Harmonic Generation in Submicron AlGaAs/AlxOy Waveguides
2005 · Luigi Scaccabarozzi, Xiaojun Yu, et al. · Conference on Lasers and Electro-Optics · 3
Dichroic mirror embedded in a submicrometer waveguide for enhanced resonant nonlinear optical devices
2006 · Luigi Scaccabarozzi, M. M. Fejer, et al. · Optics Letters · 2
Characterization of 0.5 mm thick films of orientation-patterned GaAs for nonlinear optical applications
2001 · T.J. Pinguet, O. Levi, et al. · Conference on Lasers and Electro-Optics · 2
Photoluminescence-based detection of particle contamination on extreme ultraviolet reticles
2015 · A. Gao, P. J. Rizo, et al. · Review of Scientific Instruments · 1
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Mid-infrared generation by difference-frequency mixing in orientation-patterned GaAs
2001 · O. Levi, T.J. Pinguet, et al. · Conference on Lasers and Electro-Optics · 1
Photoluminescence-based detection of particle coontamination on EUV reticle
2012 · An Gao, Luigi Scaccabarozzi, et al. · University of Twente Research Information
Study of EUV induced defects on few-layer graphene
2012 · An Gao, P. Rizo, et al. · University of Twente Research Information
Time evolution of highly transient laser induced plasmas used for EUV Mask cleaning
2010 · NA Niels Lammers, Luigi Scaccabarozzi, et al. · TU/e Research Portal
Low loss orientation-patterned AlGaAs waveguides for quasi phase matched second harmonic generation
2006 · Xiaojun Yu, Luigi Scaccabarozzi, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Enhanced second-harmonic generation in AlGaAs/AlxOy cavities embedded in submicron waveguides
2006 · L. Scaccabarozzi, Y. Huo, et al. · Conference on Lasers and Electro-Optics
Artificially birefringent aluminum gallium arsenide/aluminum oxide-based submicron waveguides and resonant cavities for nonlinear optics
2006 · Luigi Scaccabarozzi
Fabrication and characterization of tightly confining AlGaAs waveguides and microcavities for nonlinear optical applications
2005 · Luigi Scaccabarozzi, Zheng Wang, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Tightly confining AlGaAs waveguides and microcavities for optical frequency conversion
2004 · Luigi Scaccabarozzi, Zheng Wang, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Template design and fabrication for low loss orientation-patterned nonlinear AlGaAs waveguides pumped at 1.55 μm
2003 · X. Yu, L. Scaccabarozzi, et al. · International Conference on Molecular Bean Epitaxy
Second harmonic generation in orientation-patterned AlGaAs waveguides pumped at 1.55 μm
2002 · T.J. Pinguet, L. Scaccabarozzi, et al. · IEEE Lasers and Electro-Optics Society Annual Meeting (LEOS)
Works count: 26
Citation count: 473
H-index: 10
I10-index: 10
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