Get started
Author

Seong Yoel No

Observed institution: Georgia Institute of Technology
OpenAlex ID: A5000266124
The HARPSS process for fabrication of nano-precision silicon electromechanical resonators
2002 · Seong Yoel No, F. Ayazi · IEEE Conference on Nanotechnology (IEEE NANO) · 14
Works count: 1
Citation count: 14
H-index: 1
I10-index: 1
Year
Topic
Type