Get started
Author

M. Bossel

OpenAlex ID: A5000327979
Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic
2002 · L.J. Guerin, M. Bossel, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 138
Metal film protection of CMOS wafers against KOH
2002 · U. Munch, O. Brand, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 6
Works count: 2
Citation count: 144
H-index: 2
I10-index: 1
Year
Topic
Type