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Kyle Y. Flanigan
Observed names:
Flanigan, Kyle,
Kyle Flanigan
Institution:
Mallinckrodt (United States)
Observed institutions:
Pacific Northwest National Laboratory,
University of Washington,
Mallinckrodt (United States),
Honeywell (United States)
OpenAlex ID:
A5029889306
Conformation Heterogeneity and Mobility of Surfactant Molecules in Intercalated Clay Minerals Studied by Solid-State NMR
2000
·
Li-Qiong Wang
, Jun Liu
, et al.
·
The Journal of Physical Chemistry B
·
155
Characterization of line-edge roughness (LER) propagation from resists: underlayer interfaces in ultrathin resist films
2010
·
Simi A. George
, Patrick P. Naulleau
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
19
A high-Si content middle layer for ArF trilayer patterning
2008
·
Joseph Kennedy
, Songyuan Xie
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
Performance of an ArF siloxane BARC exposed to a 172-nm UV cure for double patterning applications
2009
·
Ze-Yu Wu
, Joseph Kennedy
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
1
High Si content anti-reflective coatings and their extension to a UV freeze dual patterning process
2009
·
Joseph Kennedy
, ZeYu Wu
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
High-Si content BARC for dual-BARC systems such as trilayer patterning
2009
·
Joseph Kennedy
, Song-Yuan Xie
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
High Si content BARC for applications in dual BARC systems such as tri-layer patterning
2008
·
Joseph Kennedy
, Song-Yuan Xie
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
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Works count:
8
Citation count:
177
H-index:
2
I10-index:
2
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