2005 · M. Keil, M. Beck, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 21

Nanoimprint lithography for the fabrication of interdigitated cantilever arrays

2006 · Gang Luo, Ivan Maximov, et al. · Nanotechnology · 18

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Wafer-scale nanofabrication of sub-100 nm arrays by deep-UV displacement Talbot lithography

2020 · Víctor J Gómez, Mariusz Graczyk, et al. · Nanotechnology · 16

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Nonlinear electrical properties of Si three-terminal junction devices

2010 · Fantao Meng, Jie Sun, et al. · Applied Physics Letters · 16

Comparison of UV-curable materials for high-resolution polymer nanoimprint stamps

2022 · Muhammad H. Asif, Mariusz Graczyk, et al. · Micro and Nano Engineering · 14

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Nanoimprint stamps with ultra-high resolution: Optimal fabrication techniques

2018 · Mariusz Graczyk, Andrea Cattoni, et al. · Microelectronic Engineering · 14

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Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arrays

2000 · Lars Montelius, Babak Heidari, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11

High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si

1999 · Yanwen Zhang, Thomas Winzell, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 11

High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching

2018 · Sabbir A. Khan, Dmitry B. Suyatin, et al. · ACS Applied Nano Materials · 10

High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si

1999 · Yanwen Zhang, Thomas Winzell, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 9

Design and development of nanoimprint-enabled structures for molecular motor devices

2018 · Frida W Lindberg, Till Korten, et al. · Materials Research Express · 8

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High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si

1999 · Yanwen Zhang, Thomas Winzell, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 6

Fabrication and Characterization of Ultra-Thin PIN Silicon Detectors for Counting the Passage of MeV Ions

2013 · Naseem Abdel, Jan Pallon, et al. · IEEE Transactions on Nuclear Science · 5

Improving nanoimprint lithography stamps for the 10 nm features

2002 · M. Beck, M. Graczyk, et al. · IEEE Conference on Nanotechnology (IEEE NANO) · 5

Scanning probe microscopy characterisation of masked low energy implanted nanometer structures

2001 · Thomas Winzell, Srinivasan Anand, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 5

Enhanced Anisotropic Effective g Factors of an Al0.25Ga0.75N/GaN Heterostructure Based Quantum Point Contact

2013 · Fangchao Lu, Ning Tang, et al. · Nano Letters · 4

Works count: 49

Citation count: 848

H-index: 14

I10-index: 18