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Kai Kolari
Observed names:
K Kolari,
K. Kolari
Institution:
VTT Technical Research Centre of Finland
Observed institutions:
University of Helsinki,
Murata (Finland),
VTT Technical Research Centre of Finland
OpenAlex ID:
A5037545849
Deep Reactive Ion Etching
2015
·
Franz Laermer
, Sami Franssila
, et al.
·
Elsevier eBooks
·
77
Deep plasma etching of glass for fluidic devices with different mask materials
2008
·
Kai Kolari
, Ville Saarela
, et al.
·
Journal of Micromechanics and Microengineering
·
72
PDF
Deep reactive ion etching
2020
·
Franz Laermer
, Sami Franssila
, et al.
·
Elsevier eBooks
·
61
Deep plasma etching of glass with a silicon shadow mask
2007
·
K. Kolari
·
Sensors and Actuators A Physical
·
61
Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition
2006
·
J. Dekker
, K. Kolari
, et al.
·
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
·
44
Dry-etched silicon-on-insulator waveguides with low propagation and fiber-coupling losses
2005
·
K. Solehmainen
, T. Aalto
, et al.
·
Journal of Lightwave Technology
·
38
A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis
2006
·
S. Franssila
, S. Marttila
, et al.
·
Journal of Microelectromechanical Systems
·
37
High etch selectivity for plasma etching SiO2 with AlN and Al2O3 masks
2008
·
K. Kolari
·
Microelectronic Engineering
·
34
Integrated liquid chromatography–heated nebulizer microchip for mass spectrometry
2010
·
Markus Haapala
, Ville Saarela
, et al.
·
Analytica Chimica Acta
·
30
Deep Reactive Ion Etching
2010
·
Franz Laermer
, Sami Franssila
, et al.
·
Elsevier eBooks
·
22
Real-time analysis of PCR inhibition on microfluidic materials
2007
·
K. Kolari
, R. Satokari
, et al.
·
Sensors and Actuators B Chemical
·
22
Investigation of thin polymer layers for biosensor applications
2012
·
András Saftics
, Emil Agócs
, et al.
·
Applied Surface Science
·
17
Tunable hydrophilicity on a hydrophobic fluorocarbon polymer coating on silicon
2006
·
K. Kolari
, A. Hokkanen
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
15
Silicon–glass instrumented solid-phase extraction–zone electrophoresis microchip with thin amorphous silicon film electrodes: performance in immunoaffinity analysis
2008
·
Ari Hokkanen
, Heli Sirén
, et al.
·
Microsystem Technologies
·
10
Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition
2014
·
K Kolari
, T Havia
, et al.
·
Journal of Micromechanics and Microengineering
·
9
Design and process development of a photonic crystal polymer biosensor for point-of-care diagnostics
2011
·
F. Dortu
, H. Egger
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
9
PDF
Smoothing of microfabricated silicon features by thermal annealing in reducing or inert atmospheres
2010
·
K Kolari
, T Vehmas
, et al.
·
Physica Scripta
·
9
PDF
NIL fabrication of a polymer-based photonic sensor device in P3SENS project
2012
·
Domenico Giannone
, Fabian Dortu
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
7
Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors
2011
·
P. Petrik
, H. Egger
, et al.
·
MRS Proceedings
·
6
Self-feeding microfluidic structures on silicon and glass
2005
·
Kai Kolari
, Ari Hokkanen
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
Stimulation of human embryonic stem cell‐derived cardiomyocytes on thin‐film microelectrodes
2011
·
Jouko Viitanen
, Päivi Heimala
, et al.
·
Biotechnology Journal
·
5
PDF
Fabrication of silicon and glass devices for microfluidic bioanalytical applications
2008
·
Kai Kolari
·
Aaltodoc (Aalto University)
·
4
PDF
Active silicon support for DNA diagnostics
2003
·
Ari P. Hokkanen
, Joona Koponen
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
List of Contributors
2015
·
Timo Aalto
, Veli-Matti Airaksinen
, et al.
·
Elsevier eBooks
·
2
Design and process development of a photonic crystal polymer biosensor for point of care diagnostics
2011
·
F. Dortu
, H. Egger
, et al.
·
2
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Works count:
47
Citation count:
603
H-index:
13
I10-index:
14
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