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T. Meguro
Observed names:
T Meguro,
T. MEGURO,
Tatsuya MEGURO,
Tatsuya Meguro,
Tetsuya Meguro
Institution:
Hiroshima University
Observed institutions:
Hiroshima University,
Toshiba (Japan),
Waseda University,
Yamaguchi University,
Yokohama National University,
Tohoku Gakuin University,
RIKEN,
Research Institute for Semiconductor Engineering, Hiroshima University
show all 8
ORCID:
0000-0002-1158-2662
Observed ORCID:
0000-0002-1158-2662
OpenAlex ID:
A5051255682
Digital etching of GaAs: New approach of dry etching to atomic ordered processing
1990
·
T. Meguro
, M. Hamagaki
, et al.
·
Applied Physics Letters
·
100
Creation of nanodiamonds by single impacts of highly charged ions upon graphite
2001
·
T. Meguro
, A. Hida
, et al.
·
Applied Physics Letters
·
74
Preparation and electrical properties of sintered oxides composed of Mn1.5Co(0.25+X)Ni(1.25-X)O4 ( $$0 \leqq X \leqq 0.75$$ ) with a cubic spinel structure
2007
·
T. Yokoyama
, T. Meguro
, et al.
·
Journal of Materials Science
·
51
Cell adhesion to nitrogen-doped DLCs fabricated by plasma-based ion implantation and deposition method using toluene gas
2007
·
T. Yokota
, T. Terai
, et al.
·
Surface and Coatings Technology
·
49
Assessment of adsorption-desorption characteristics of adsorbents for adsorptive desiccant cooling system
2004
·
Y. Tashiro
, M. Kubo
, et al.
·
Journal of Materials Science
·
48
Surface processes in digital etching of GaAs
1993
·
T. Meguro
, M. Ishii
, et al.
·
Thin Solid Films
·
39
Morphology-retaining synthesis of AlN particles by gas reduction–nitridation
2002
·
T Suehiro
, J Tatami
, et al.
·
Materials Letters
·
36
Microscopic mechanisms of accurate layer-by-layer growth of β-SiC
1993
·
Shiro Hara
, T. Meguro
, et al.
·
Thin Solid Films
·
33
Amplifier Based on 4H-SiC MOSFET Operation at 500 °C for Harsh Environment Applications
2022
·
Vuong Van Cuong
, Tatsuya Meguro
, et al.
·
IEEE Transactions on Electron Devices
·
32
Control of the etching reaction of digital etching using tunable UV laser irradation
1994
·
T. Meguro
, M. Ishii
, et al.
·
Applied Surface Science
·
29
Solid-state tunable deep-ultraviolet laser system from 198 to 300 nm
1994
·
T. Meguro
, T. Caughey
, et al.
·
Optics Letters
·
26
Surface processes in laser-atomic layer epitaxy (laser-ALE) of GaAs
1988
·
T. Meguro
, T. Suzuki
, et al.
·
Journal of Crystal Growth
·
24
Integrated 4H-SiC Photosensors With Active Pixel Sensor-Type Circuits for MGy-Class Radiation Hardened CMOS UV Image Sensor
2022
·
Masayuki Tsutsumi
, Tatsuya Meguro
, et al.
·
IEEE Electron Device Letters
·
17
PDF
Monolayer growth and direct writing of GaAs by pulsed laser metalorganic vapor phase epitaxy
1988
·
S. Iwai
, T. Meguro
, et al.
·
Thin Solid Films
·
17
Nanoscale transformation of sp2 to sp3 of graphite by slow highly charged ion irradiation
2003
·
T. Meguro
, A. Hida
, et al.
·
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
·
16
Digital etching of GaAs
1997
·
T Meguro
, Y Aoyagi
·
Applied Surface Science
·
16
High-temperature reliability of integrated circuit based on 4H-SiC MOSFET with Ni/Nb ohmic contacts for harsh environment applications
2020
·
Vuong Van Cuong
, Seiji Ishikawa
, et al.
·
Japanese Journal of Applied Physics
·
15
PDF
Atomic layer epitaxy of AlAs and AlGaAs
1990
·
T. Meguro
, S. Iwai
, et al.
·
Journal of Crystal Growth
·
15
Emission characteristics of single-crystal LaB6 electron gun
1982
·
T. Takigawa
, I. Sasaki
, et al.
·
Journal of Applied Physics
·
15
Thermal Stability of Gate Driver Circuits Based on 4H-SiC MOSFETs at 300°C for High-Power Applications
2025
·
Vuong Van Cuong
, Tatsuya Meguro
, et al.
·
IEEE Journal of the Electron Devices Society
·
14
P-type doping of hydrogenated amorphous silicon films with boron by reactive radio-frequency co-sputtering
2001
·
Y. Ohmura
, M. Takahashi
, et al.
·
Physica B Condensed Matter
·
14
Digital etching by using a laser beam: on the control of digital etching products
1994
·
M. Ishii
, T. Meguro
, et al.
·
Applied Surface Science
·
14
Hybrid Pixels With Si Photodiode and 4H-SiC MOSFETs Using Direct Heterogeneous Bonding Toward Radiation Hardened CMOS Image Sensors
2022
·
Tatsuya Meguro
, Akinori Takeyama
, et al.
·
IEEE Electron Device Letters
·
13
PDF
Nanoscale modification of electronic states of HOPG by the single impact of HCI
2005
·
T. Meguro
, Y. Yamaguchi
, et al.
·
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
·
13
Surface photo-absorption study of the laser-assisted atomic layer epitaxial growth process of GaAs
1993
·
J.P. Simko
, T. Meguro
, et al.
·
Thin Solid Films
·
13
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Works count:
79
Citation count:
886
H-index:
16
I10-index:
31
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