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R. Lenggenhager
Observed names:
Lenggenhager, René,
R. Lenngenhager
Institutions:
ETH Zurich,
Institute for Quantum Electronics
Observed institutions:
ETH Zurich,
Institute for Quantum Electronics
OpenAlex ID:
A5059675727
Silicon gas flow sensors using industrial CMOS and bipolar IC technology
1991
·
D. Moser
, R. Lenggenhager
, et al.
·
Sensors and Actuators A Physical
·
99
Thermoelectric infrared sensors by CMOS technology
1992
·
R. Lenggenhager
, H. Baltes
, et al.
·
IEEE Electron Device Letters
·
86
Thermoelectric infrared sensors in CMOS technology
1993
·
R. Lenggenhager
, H. Baltes
, et al.
·
Sensors and Actuators A Physical
·
65
Fabrication and modelling of CMOS microbridge gas-flow sensors
1992
·
D. Moser
, R. Lenggenhager
, et al.
·
Sensors and Actuators B Chemical
·
61
Capacitive sensors in CMOS technology with polymer coating
1995
·
C. Cornila
, A. Hierlemann
, et al.
·
Sensors and Actuators B Chemical
·
51
Model of thermoelectric radiation sensors made by CMOS and micromachining
1992
·
T. Elbel
, R. Lenggenhager
, et al.
·
Sensors and Actuators A Physical
·
34
Vacuum gauging with complementary metal–oxide–semiconductor microsensors
1995
·
O. Paul
, O. Brand
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
30
CMOS thermoelectric infrared sensors
1994
·
Lenggenhager, René
, Baltes, Henry
·
ETH Zürich Research Collection
·
28
Analytical 2D-model of CMOS micromachined gas flow sensors
2002
·
G. Wachutka
, R. Lenggenhager
, et al.
·
International Conference on Solid-State Sensors, Actuators and Microsystems
·
25
CMOS membrane infrared sensors and improved TMAHW etchant
2002
·
R. Lenggenhager
, D. Jaeggi
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
19
IMEMS - Integrated Micro Electro Mechanical Systems by VLSI and Micromachining
1994
·
H. Baltes
, Oliver Brand
, et al.
·
European Solid-State Device Research Conference
·
15
Low noise multirate SC read-out circuitry for thermoelectric integrated infrared sensors
2002
·
P. Malcovati
, C.A. Leme
, et al.
·
Conference proceedings - IEEE Instrumentation/Measurement Technology Conference
·
12
Low-noise multirate SC read-out circuitry for thermoelectric integrated infrared sensors
1995
·
P. Malcovati
, C.A. Leme
, et al.
·
IEEE Transactions on Instrumentation and Measurement
·
12
Silicon microsensors and microstructures
2003
·
H. Baltes
, T. Boltshauser
, et al.
·
IEEE International Symposium on Circuits and Systems proceedings
·
11
Linear CMOS power controller for precision sensor applications
2003
·
C.A. Leme
, R. Lenggenhager
, et al.
·
IEEE International Symposium on Circuits and Systems proceedings
·
7
Influence of air pressure on resonating and thermoelectric microstructures realized with standard IC technologies
2002
·
O. Brand
, R. Lenggenhager
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
7
Thermal microtransducers by CMOS technology combined with micromachining
1991
·
H. Baltes
, D. Moser
, et al.
·
Microelectronic Engineering
·
4
Computer-aided trade-off study of an integrated infrared sensor
2002
·
J.G. Korvink
, R. Lenggenhager
, et al.
·
Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD)
·
2
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Works count:
18
Citation count:
568
H-index:
12
I10-index:
14
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