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Thorsten Reichardt
Institution:
Schott (Germany)
Observed institution:
Schott (Germany)
OpenAlex ID:
A5060715280
Recent results on EUV mask blank multilayers and absorbers
2005
·
Holger Seitz
, Frank Sobel
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
Production challenges of making EUV mask blanks
2005
·
Holger Seitz
, Frank Sobel
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
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2
Citation count:
5
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