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Kiwamu Tsukamoto
Institution:
Ebara (Japan)
Observed institution:
Ebara (Japan)
OpenAlex ID:
A5082249124
Performance of EBeyeM for EUV mask inspection
2011
·
Shinji Yamaguchi
, Masato Naka
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
29
Development of EB inspection system EBeyeM for EUV mask
2010
·
Takashi Hirano
, Shinji Yamaguchi
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
19
Capability of model EBEYE M for EUV mask production
2012
·
Masato Naka
, Shinji Yamaguchi
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
Capability of particle inspection on patterned EUV mask using model EBEYE M
2014
·
Masato Naka
, Ryoji Yoshikawa
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
1
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Works count:
4
Citation count:
55
H-index:
3
I10-index:
2
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