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Robert J. Rafac
Observed names:
R Rafac,
R. J. Rafac,
R. Rafac,
R.J. Rafac,
RAFAC, ROBERT J.,
Robert J Rafac,
Robert Rafac
show all 7
Institution:
ASML (United States)
Observed institutions:
University of Notre Dame,
Argonne National Laboratory,
National Institute of Standards and Technology,
ASML (United States)
OpenAlex ID:
A5083556579
Sub-dekahertz Ultraviolet Spectroscopy of 199Hg+
2000
·
R. J. Rafac
, B. C. Young
, et al.
·
Physical Review Letters
·
261
PDF
Optical frequency standards and measurements
2001
·
L. Hollberg
, C.W. Oates
, et al.
·
IEEE Journal of Quantum Electronics
·
126
Fast-beam laser lifetime measurements of the cesium 6p2P1/2,3/2 states
1999
·
Robert J. Rafac
, Carol E. Tanner
, et al.
·
Physical Review A
·
91
Precision lifetime measurements of the 6 p2 P1/2,3/2 states in atomic cesium
1994
·
R. J. Rafac
, C. E. Tanner
, et al.
·
Physical Review A
·
69
Stable configurations of confined cold ionic systems.
1991
·
R Rafac
, J P Schiffer
, et al.
·
Proceedings of the National Academy of Sciences
·
69
Measurement of the ratio of the cesium D -line transition strengths
1998
·
Robert J. Rafac
, Carol E. Tanner
·
Physical Review A
·
62
Laser pulse shaping via extremum seeking
2012
·
Beibei Ren
, Paul Frihauf
, et al.
·
Control Engineering Practice
·
52
Measurement of the 6 p2 P3/2 state lifetime in atomic cesium
1992
·
C. E. Tanner
, A. E. Livingston
, et al.
·
Physical Review Letters
·
50
Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W
2018
·
Igor V. Fomenkov
, Alexander A. Schafgans
, et al.
·
Extreme Ultraviolet (EUV) Lithography
·
45
Measurement of the 133Cs 6p2P1/2 state hyperfine structure
1997
·
Robert J. Rafac
, Carol E. Tanner
·
Physical Review A
·
38
Direct comparison of two cold-atom-based optical frequency standards by using a femtosecond-laser comb
2001
·
K. R. Vogel
, S. A. Diddams
, et al.
·
Optics Letters
·
31
LPP EUV source readiness for NXE 3300B
2014
·
David C. Brandt
, Igor V. Fomenkov
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
25
Effects of laser bandwidth on OPE in a modern lithography tool
2006
·
Kevin Huggins
, Toki Tsuyoshi
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
22
Laser produced plasma EUV sources for device development and HVM
2012
·
David C. Brandt
, Igor V. Fomenkov
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
18
Hg+ Optical Frequency Standard: Recent Progress | NIST
2000
·
B. Young
, Robert J. Rafac
, et al.
·
15
Laser produced plasma light source development for HVM
2014
·
Igor V. Fomenkov
, David C. Brandt
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
12
Scaling LPP EUV sources to meet high volume manufacturing requirements (Conference Presentation)
2017
·
Alexander A. Schafgans
, Daniel J. Brown
, et al.
·
10
Active spectral control of DUV light sources for OPE minimization
2006
·
Wayne J. Dunstan
, Robert Jacques
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
10
CO2/Sn LPP EUV sources for device development and HVM
2013
·
David C. Brandt
, Igor V. Fomenkov
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
7
Laser Pulse Shaping via Iterative Learning Control and High-Dimensional Extremum Seeking
2011
·
Beibei Ren
, Paul Frihauf
, et al.
·
ASME Dynamic Systems and Control Conference (DSCC)
·
6
Overcoming limitations of etalon spectrometers used for spectral metrology of DUV excimer light sources
2004
·
Robert J. Rafac
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
Construction of fiber-optic bundle light-collection systems and calculations of collection efficiency
2002
·
Diana DiBerardino
, Robert J. Rafac
, et al.
·
Optics Communications
·
6
Sub-dekahertz spectroscopy of199Hg+
2001
·
James C. Bergquist
, R. J. Rafac
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
Precision lifetime measurements using laser excitation of a fast atomic beam
1995
·
C.E. Tanner
, A.E. Livingston
, et al.
·
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
·
4
PDF
NXE:3400B EUV source performance in the field, readiness for HVM and power scaling beyond 250W
2018
·
Igor V. Fomenkov
, Michael A. Purvis
, et al.
·
International Conference on Extreme Ultraviolet Lithography
·
3
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Works count:
53
Citation count:
1,070
H-index:
15
I10-index:
18
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