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Vasil Yanev

Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics
2008 · Vasil Yanev, Mathias Rommel, et al. · Applied Physics Letters · 87
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Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques
2010 · M. Rommel, G. Spoldi, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 45
Investigations of MBE grown InN and the influence of sputtering on the surface composition
2004 · S. Krischok, V. Yanev, et al. · Surface Science · 30
Influence of the RF power on the deposition rate and the chemical surface composition of fluorocarbon films prepared in dry etching gas plasma
2004 · V. Yanev, S. Krischok, et al. · Surface Science · 29
Experimental observation of FIB induced lateral damage on silicon samples
2009 · G. Spoldi, S. Beuer, et al. · Microelectronic Engineering · 27
Improved insight in charge trapping of high-k ZrO2/SiO2 stacks by use of tunneling atomic force microscopy
2008 · A. Paskaleva, V. Yanev, et al. · Journal of Applied Physics · 27
Current Voltage Characteristics through Grains and Grain Boundaries of High-k Dielectric Thin Films Measured by Tunneling Atomic Force Microscopy
2011 · Katsuhisa Murakami, Mathias Rommel, et al. · AIP conference proceedings · 19
Effects of X-ray radiation on the surface chemical composition of plasma deposited thin fluorocarbon films
2007 · M. Himmerlich, V. Yanev, et al. · Polymer Degradation and Stability · 16
A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
2011 · Katsuhisa Murakami, Mathias Rommel, et al. · Journal of Applied Physics · 14
Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale
2009 · V. Yanev, T. Erlbacher, et al. · Microelectronic Engineering · 13
Tuning of Surface Properties of AlGaN/GaN Sensors for Nanodroplets and Picodroplets
2006 · C. Buchheim, G. Kittler, et al. · IEEE Sensors Journal · 12
SSRM characterisation of FIB induced damage in silicon
2008 · S Beuer, V Yanev, et al. · Journal of Physics Conference Series · 10
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Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2−x thin films using tunneling atomic force microscopy
2009 · W. Weinreich, L. Wilde, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 7
Gate oxide reliability at the nanoscale evaluated by combining conductive atomic force microscopy and constant voltage stress
2011 · T. Erlbacher, V. Yanev, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 6
Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy
2011 · V. Yanev, M. Rommel, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 5
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(Invited) Electrical Scanning Probe Microscopy Techniques for the Detailed Characterization of High-k Dielectric Layers
2010 · Mathias Rommel, Vasil Yanev, et al. · ECS Transactions · 5
Surface modifications of AlGaN/GaN sensors for water based nano- and picodroplets
2006 · C. Buchheim, G. Kittler, et al. · Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ... · 3
Characterization of Ru and RuO2 thin films prepared by pulsed metal organic chemical vapor deposition
2008 · G. Roeder, C. Manke, et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2
Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
2010 · J.D. Jambreck, V. Yanev, et al. · Microelectronic Engineering · 1
Surface modifications of AlGaN/GaN sensors for water based nano- and picodroplets
2004 · C. Buchheim, G. Kittler, et al. · 1
Electrical Scanning Probe Microscopy Techniques for the Detailed Characterization of High-k Dielectric Layers
2010 · Mathias Rommel, Vasil Yanev, et al. · ECS Meeting Abstracts
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Works count: 37
Citation count: 359
H-index: 11
I10-index: 12
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