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Yilin Weng
Observed name:
Y. Weng
Institution:
University of Illinois Urbana-Champaign
Observed institutions:
University of Illinois Urbana-Champaign,
University of Illinois System
OpenAlex ID:
A5110155567
Method for including electron-electron collisions in Monte Carlo simulations of electron swarms in partially ionized gases
1990
·
Yilin Weng
, Mark J. Kushner
·
Physical Review A
·
59
Electron energy distributions in electron cyclotron resonance discharges for materials processing
1992
·
Yilin Weng
, Mark J. Kushner
·
Journal of Applied Physics
·
53
Electron Energy Distributions In Electron Cyclotron Resonance Plasmas for Materials Processing
1991
·
Yilin Weng
, M.J. Kushner
·
IEEE International Conference on Plasma Science (ICOPS)
Self-consistent Monte Carlo simulations of plasma processing reactors
1991
·
Yilin Weng
·
Illinois Digital Environment for Access to Learning and Scholarship (University of Illinois at Urbana-Champaign)
Simulation of remote plasma activated processing using electron cyclotron resonance excited discharges
1990
·
Y. Weng
, M.J. Kushner
·
IEEE International Conference on Plasma Science (ICOPS)
Including electron-electron collisions in Monte Carlo simulations of swarms in partially ionized plasmas
1989
·
Y. Weng
, M.J. Kushner
·
IEEE International Conference on Plasma Science (ICOPS)
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Works count:
6
Citation count:
112
H-index:
2
I10-index:
2
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