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Tomohiro Kubota
Observed institutions:
Tohoku University,
Institute of Fluid Science, Tohoku University
OpenAlex ID:
A5110207366
Ultimate top-down etching processes for future nanoscale devices
2008
·
Seiji Samukawa
, Tomohiro Kubota
·
IEEE International Conference on Solid-State and Integrated Circuit Technology
·
7
D-2-5 Method to Evaluate the Influence of Etching Damage on Microcantilever Surface on Its Mechanical Properties
2011
·
Shinji Ueki
, Yuki Nishimori
, et al.
·
The Proceedings of the Conference on Information Intelligence and Precision Equipment IIP
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Works count:
2
Citation count:
7
H-index:
1
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