2017 · Elizabeth H. Steenbergen, Gamini Ariyawansa, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 25
2013 · Elizabeth H. Steenbergen, Jeremy A. Massengale, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
2015 · Geoffrey D. Jenkins, Christian P. Morath, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
2014 · Geoffrey D. Jenkins, Christian P. Morath, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
2017 · Daniel E. Sidor, Gregory R. Savich, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 4