Author

Zhengquan Tan

Observed institutions: Argonne National Laboratory, National Institute of Standards and Technology, University of Connecticut, Zunyi Medical University, Brookhaven National Laboratory, Dalian University of Technology, KLA (Israel), KLA (United States)

ORCID: 0009-0001-8935-0116

Observed ORCID: 0009-0001-8935-0116

OpenAlex ID: A5111584537

Gold-induced germanium crystallization

1992 · Zhengquan Tan, S. M. Heald, et al. · Physical review. B, Condensed matter · 80

Structural parameter determination in fluorescence EXAFS of concentrated samples

1989 · Zhengquan Tan, Joseph I. Budnick, et al. · Review of Scientific Instruments · 63

Strontium-induced oxygen defect structure and hole doping in La2−x Srx CuO4

1990 · Zhengquan Tan, M. E. Filipkowski, et al. · Physical Review Letters · 53

Nature of hole doping in Nd2 NiO4 and La2 NiO4 : Comparison with La2 CuO4

1993 · Zhengquan Tan, S. M. Heald, et al. · Physical review. B, Condensed matter · 31

Silicide formation and structural evolution in Fe-, Co-, and Ni-implanted silicon

1992 · Zhengquan Tan, F. Namavar, et al. · Physical review. B, Condensed matter · 30

X-ray-absorption studies of cation ordering and valence in the T* -phase La2−x−y Rx Sry CuO4 (R=Sm, Eu, Gd, Tb, and Dy)

1991 · Zhengquan Tan, J. I. Budnick, et al. · Physical review. B, Condensed matter · 30

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Polarization x-ray-absorption near-edge structure study of Pr2−x Cex CuO4 single crystals: The nature of Ce doping

1990 · Zhengquan Tan, J. I. Budnick, et al. · Physical review. B, Condensed matter · 25

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Fabrication and electrocatalytic properties of ferromagnetic nanoporous PtFe by dealloying an amorphous Fe 60 Pt 10 B 30 alloy

2017 · Shuli Ou, Dianguo Ma, et al. · Journal of Alloys and Compounds · 23

Rare-earth valence and doping inT-,T’-, and T* -phase R2 CuO4 (R=rare earths)

1992 · Zhengquan Tan, S. M. Heald, et al. · Physical review. B, Condensed matter · 21

Observation of lanthanum- and rare-earth-site ordering in T* -phase La2−x−y Rx Sry CuO4 (R=Sm, Eu, Gd, Tb)

1990 · Zhengquan Tan, J. I. Budnick, et al. · Physical review. B, Condensed matter · 21

Sequential-ion-implantation synthesis of ternary metal silicides

1993 · Zhengquan Tan, F. Namavar, et al. · Applied Physics Letters · 20

Mueller matrix spectroscopy and physics-based machine learning for gate-all-around sheet-specific metrology

2023 · Houssam Chouaib, Anderson Chou, et al. · Metrology, Inspection, and Process Control XXXVI · 14

139La nuclear quadrupole resonance studies of pure and (Sr and Ni) doped La2CuO4

1988 · Zhengquan Tan, J.I. Budnick, et al. · Physica C Superconductivity · 10

X-ray-absorption studies of krypton precipitates in solid matrices

1991 · Zhengquan Tan, J. I. Budnick, et al. · Physical review. B, Condensed matter · 9

CDSAXS study of 3D NAND channel hole etch pattern edge effects and etched hole pattern variance

2024 · Jin Zhang, Tian Lan, et al. · Metrology, Inspection, and Process Control XXXVI · 8

Flash memory hole etch profile monitoring using x-ray and optical scatterometry

2023 · Osman Sorkhabi, Jin Zhang, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 7

X-ray absorption studies of atomic and electronic structures of Nd2−xMxCuO4 (M = Ce and Th)

1990 · Zhengquan Tan, J.I. Budnick, et al. · Physica B Condensed Matter · 7

Phase decomposition in nominal LaxCuO4 (x≤2.00) determined by extended x-ray absorption fine structure

1989 · Zhengquan Tan, J.I. Budnick, et al. · Physica C Superconductivity · 5

Novel ellipsometry metrology-based machine learning technique for low sensitivity characterization of critical dimensions within gate-all-around transistors

2024 · Houssam Chouaib, Valeria Dimastrodonato, et al. · Metrology, Inspection, and Process Control XXXVI · 4

Interfacial reactions between nickel–chromium alloys and aluminum

1992 · Zhengquan Tan, S. M. Heald · Journal of Applied Physics · 3

High throughput 3D NAND structure monitoring by x-ray scattering

2024 · Ying Gao, Tian Lan, et al. · Metrology, Inspection, and Process Control XXXVI · 2

Optical in die NZO benefit for DRAM manufacturing

2024 · Fang-Jyun (June) Yeh, Shang-Hong (Sam) Tsai, et al. · Metrology, Inspection, and Process Control XXXVI · 2

Global tilt measurement on irregular PIL supporting patterns in 3D NAND memory

2024 · Yung-Yi Lin, Tien-Jung Lee, et al. · Metrology, Inspection, and Process Control XXXVI · 2

Enable in-die overlay measurement on DRAM storage node by line scan self-calibration method

2024 · Fang-Jyun (June) Yeh, Shang-Hong (Sam) Tsai, et al. · Metrology, Inspection, and Process Control XXXVI · 2

Tracking the defects of ultra-thin HfO2 using a Cody-Lorentz multiple oscillator model

2018 · Aaron Rosenberg, Dawei Hu, et al. · Metrology, Inspection, and Process Control XXXVI · 2

Works count: 48

Citation count: 487

H-index: 12

I10-index: 13