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Makoto Ezumi

Observed names: M Ezumi, M. Ezumi
OpenAlex ID: A5111617263
Behaviour of oxides during friction stir welding of aluminium alloy and their effect on its mechanical properties
2002 · H Okamura, K Aota, et al. · Welding International · 39
Improved CD-SEM optics with retarding and boosting electric fields
1999 · Yoichi Ose, Makoto Ezumi, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 16
Long-term critical dimension measurement performance for a new mask CD-SEM, S-9380M
2007 · Zhigang Wang, Kock Khuen Seet, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
Development of critical dimension measurement scanning electron microscope for ULSI (S-8000 series)
1996 · Makoto Ezumi, Tadashi Otaka, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Nanometer-level metrology with a low-voltage CD SEM
1998 · Toshiyuki Yoshimura, Makoto Ezumi, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
Correction method for high-precision CD measurements on electrostatically charged wafers
2002 · Yoichi Ose, Makoto Ezumi, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Basic study of friction stir welding tool life-investigation for increase of FSW reliability
2007 · H. Takai, M. Ezumi, et al. · Welding International · 3
Damage-free metrology of porous low-k dielectrics using CD-SEM
2004 · Zhao-Hui Cheng, Mari Nozoe, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
High resolution CD-SEM system
2003 · Y. Ose, M. Ezumi, et al. · Proceedings - Asian Test Symposium/Proceedings · 1
Works count: 9
Citation count: 90
H-index: 5
I10-index: 3
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