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Y. C. Pai
Observed name:
Y.-C. Pai
Institution:
United Microelectronics (Taiwan)
Observed institution:
United Microelectronics (Taiwan)
OpenAlex ID:
A5111729308
Multi-level overlay techniques for improving DPL overlay control
2012
·
Charlie Chen
, Y. C. Pai
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
High-order stitching overlay analysis for advanced process control
2011
·
Y. C. Pai
, Charlie Chen
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
Identifying process window marginalities of reticle designs for 0.15/0.13-μm technologies
2003
·
Shih Chieh Lo
, L. K. Hsieh
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
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Works count:
3
Citation count:
11
H-index:
2
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