Author

Jerome B. Sohn

Observed name: J. Sohn

OpenAlex ID: A5111822706

Photoassisted electrochemical micromachining of silicon in HF electrolytes

1994 · R. Mlcak, H.L. Tuller, et al. · Sensors and Actuators A Physical · 25

1996 · Marc S. Weinberg, Jonathan J. Bernstein, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 23

Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry

1996 · Jeffrey T. Borenstein, Paul Greiff, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 9

Photo-assisted electrochemical machining of micromechanical structures

2002 · R. Mlcak, H.L. Tuller, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 6

Works count: 4

Citation count: 63

H-index: 4

I10-index: 2