Author

Vivek Bakshi

Observed names: Bakshi, Vivek, VIVEK BAKSHI

Institutions: Birla Institute of Technology, Mesra, Amity University

Observed institutions: University of Central Florida, Birla Institute of Technology, Mesra, University of Idaho, The University of Texas at Arlington, Amity University, Texas Department of Public Safety, The University of Texas at Austin

OpenAlex ID: A5113004046

EUV Sources for Lithography

2006 · Vivek Bakshi · SPIE eBooks · 348

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EUV Lithography

2008 · Vivek Bakshi · 139

High conversion efficiency microscopic tin-doped droplet target laser-plasma source for EUVL

2005 · Chiew-Seng Koay, Simi George, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 34

Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources

2005 · Kazutoshi Takenoshita, Chiew-Seng Koay, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 25

Simulation and optimization of DPP hydrodynamics and radiation transport for EUV lithography devices

2004 · Ahmed Hassanein, Valeryi Sizyuk, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 24

Measurement of stark width of some Ar I transitions in A d.c. argon plasma jet at atmospheric pressure

1989 · Vivek Bakshi, Robert J. Kearney · Journal of Quantitative Spectroscopy and Radiative Transfer · 23

EUV Source Technology: Challenges and Status

2010 · Vivek Bakshi · SPIE eBooks · 21

An investigation of local thermodynamic equilibrium in an argon plasma jet at atmospheric pressure

1989 · Vivek Bakshi, Robert J. Kearney · Journal of Quantitative Spectroscopy and Radiative Transfer · 21

Review of the 1st EUV Light Sources Code Comparison Workshop

2023 · John Sheil, Oscar Versolato, et al. · Atoms · 18

Modeling and optimization of debris mitigation systems for laser and discharge-produced plasma in extreme ultraviolet lithography devices

2007 · Valeryi A. Sizyuk, Ahmed Hassanein, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 16

Special Section Guest Editorial: EUV Lithography for the 3-nm Node and Beyond

2017 · Vivek Bakshi, Hakaru Mizoguchi, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 14

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EUV spectroscopy of mass-limited Sn-doped laser micro-plasmas

2005 · Simi George, Chiew-Seng Koay, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 14

New tables of the Voigt function

1989 · Vivek Bakshi, R.J. Kearney · Journal of Quantitative Spectroscopy and Radiative Transfer · 9

Saha equation for a two-temperature plasma

1990 · Vivek Bakshi · Physical Review A · 8

Understanding EUV Lithography: The technology that enables extension of Moore's Law

2018 · Vivek Bakshi · SPIE Newsroom · 6

Temperature fluctuations in an atmospheric pressure d.c. thermal plasma

1989 · J. Grandy, Vivek Bakshi, et al. · Journal of Quantitative Spectroscopy and Radiative Transfer · 6

Status report on EUV source development and EUV source applications in EUVL

2007 · Vivek Bakshi, Rainer Lebert, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5

Laser Plasma EUV Sources Based on Droplet Target Technology

2010 · Martin Richardson, Chiew-Seng Koay, et al. · SPIE eBooks · 4

Experimental investigation of materials damage induced by hot Xe plasma in EUV lithography devices

2004 · Ahmed Hassanein, Tatiana Burtseva, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4

Blue-X: exploring advanced optical projection lithography below 13.5 nm

2026 · Vivek Bakshi · SPIE Optical and EUV Nanolithography · 3

Photon Source Technology for Lithography and Metrology: An Overview

2023 · Vivek Bakshi · SPIE eBooks · 3

Special Section Guest Editorial: EUV Sources for Lithography

2012 · Vivek Bakshi, Anthony Yen · Journal of Micro/Nanopatterning Materials and Metrology · 3

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EUV Source Technology

2009 · Vivek Bakshi · SPIE eBooks · 3

Effect of power variation on thermal plasma optical diagnostic data

1989 · Vivek Bakshi, R.J. Kearney · Journal of Quantitative Spectroscopy and Radiative Transfer · 2

Synergistic Combinations of Natural and Synthetic Agents: A Novel Therapeutic Frontier in Breast Cancer Management

2026 · Sadaf Arfi, Nimisha Srivastava, et al. · Mini-Reviews in Medicinal Chemistry · 1

Works count: 40

Citation count: 757

H-index: 12

I10-index: 12