Author

M. T. Gale

1997 · M.T. Gale · Microelectronic Engineering · 174
1992 · D. Prongué, H. P. Herzig, et al. · Applied Optics · 100
1995 · D. Freiner, R.E. Kunz, et al. · Sensors and Actuators B Chemical · 52
1995 · R.E. Kunz, J. Edlinger, et al. · Sensors and Actuators A Physical · 42
1992 · P. Ehbets, M. T. Gale, et al. · Optics Letters · 40
1992 · M. T. Gale, G. K. Lang, et al. · Applied Optics · 39
1997 · M. T. Gale · Journal of Imaging Science and Technology · 34
1996 · P. Gröning, A. Schneuwly, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 28
1992 · J. M. Stauffer, Y. Oppliger, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 25
2004 · S. Obi, M.T. Gale, et al. · IEEE Journal of Selected Topics in Quantum Electronics · 18
1997 · Th Hessler, M Rossi, et al. · Pure and Applied Optics Journal of the European Optical Society Part A · 15
1997 · H.J. Tiziani, R. Achi, et al. · Optics & Laser Technology · 15
1996 · C. Heine, R. H. Morf, et al. · Journal of Modern Optics · 11
1976 · M. T. Gale, K. Knop · Applied Optics · 11
1982 · M. T. Gale, H. W. Lehmann, et al. · Journal of Vacuum Science and Technology · 10
1993 · H. P. Herzig, M. T. Gale, et al. · Springer eBooks · 8
2003 · T. Overstolz, P.-A. Clerc, et al. · IEEE/LEOS International Conference on Optical MEMS · 7
2003 · K.H. Gulden, S. Eitel, et al. · IEEE Lasers and Electro-Optics Society Annual Meeting (LEOS) · 6
1986 · B. J. Curtis, M. T. Gale, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 6
1985 · F. Aschwanden, M.T. Gale, et al. · IEEE Transactions on Electron Devices · 6
1978 · K. Knop, M. T. Gale · The Journal of Photographic Science · 6
2002 · G. Blau, M.T. Gale, et al. · IEEE/LEOS International Conference on Optical MEMS · 5
2000 · M. Rossi, Th. Anuner, et al. · Diffractive Optics and Micro-Optics · 4
Works count: 61
Citation count: 724
H-index: 13
I10-index: 16
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