2001 · Mumit Khan, Geng Han, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 20

Proposal for a 50 nm proximity x-ray lithography system and extension to 35 nm by resist material selection

2000 · Toyoki Kitayama, Kenji Itoga, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 16

Nonuniform polarization of vinylidene fluoride-trifluoroethylene copolymer

1981 · Junichi Ohwaki, Hiroki Yamazaki, et al. · Journal of Applied Physics · 10

A Beamline and Its Components for SR Lithography

1989 · Takashi Kaneko, Seiichi Itabashi, et al. · Japanese Journal of Applied Physics · 8

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Synchrotron X-ray Lithography System Using A Compact Source

1989 · Toyoki Kitayama, Toa Hayasaka, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6

Synchrotron radiation lithography applied to fabrication of deep-submicrometer NMOS devices at all exposure levels

1990 · A. Yoshikawa, T. Horiuchi, et al. · Microelectronic Engineering · 5

A large angle electrostatic deflection, variable shaped, electron beam exposure system

1983 · Shigeru Moriya, Kazuhiko Komatsu, et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 5

Injector linac for Super-ALIS

2003 · T. Hosokawa, T. Kitayama, et al. · Particle Accelerator Conference (PAC) · 4

Effect of secondary electron from the substrate in x-ray lithography using harder radiation spectra

2001 · K. Itoga, K. Marumoto, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 4

Suppression of secondary electron blur by using Br-containing resists in x-ray lithography

2002 · K. Kise, K. Marumoto, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 3

Self-exchange reaction of deuterium in monodeuteriotoluene catalyzed by nickel and platinum

1968 · Kozo Hirota, Tomiko Ueda, et al. · The Journal of Physical Chemistry · 3

Compact multichip module for 10 Gbit/s lightwavereceivers

1997 · J. Nakagawa, M. Shimada, et al. · Electronics Letters · 2

Compact multi-chip modules with integrated functions for 10-Gbps lightwave transceivers

2002 · J. Nakagawa, M. Miyashita, et al. · Optical Fiber Communication Conference · 1

Resolution limit of E-beam direct writing technology

1984 · Toyoki Kitayama, Toshiaki Tamamura, et al. · Microelectronic Engineering · 1

Compact multi-chip-module for 10-Gbps lightwave receivers

2002 · J. Nakagawa, M. Shimada, et al. · Optical Fiber Communication Conference

Works count: 32

Citation count: 1,126

H-index: 12

I10-index: 13