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Masayuki Murayama
Observed name:
Masayuki Murayama Masayuki Murayama
Institution:
Nikon (Japan)
Observed institutions:
Nikon (United States),
Nikon (Japan)
OpenAlex ID:
A5113653687
Immersion lithography extension to sub-10nm nodes with multiple patterning
2014
·
Soichi Owa
, Shinji Wakamoto
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
17
Scanner performance predictor and optimizer in further low-k1 lithography
2014
·
Hajime Aoyama
, Toshiharu Nakashima
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
The Method of Measuring Optical Performance in KrF Excimer Lithography
1992
·
Kazuaki Suzuki
, Yukako Matsumoto Yukako Matsumoto
, et al.
·
Japanese Journal of Applied Physics
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Works count:
3
Citation count:
23
H-index:
2
I10-index:
1
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