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Author

Zewon Liu

Institution: Tsinghua University
Observed institution: Tsinghua University
OpenAlex ID: A5113789332
The key technologies in silicon based microwave and RF MEMS device fabrication
2005 · Zewon Liu, Xiaofeng Lei, et al. · International Conference on Microwave and Millimeter Wave Technology (ICMMT) · 3
Works count: 1
Citation count: 3
H-index: 1
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