Author

Kazuya Kusaka

Observed names: K Kusaka, K. Kusaka, KAZUYA KUSAKA, Kazuya KUSAKA, Kazuya Kusaka Kazuya Kusaka, Kusaka, Kazuya

Observed institutions: Hiroshima University, National Institute of Technology, Niihama College, Shikoku University, IHI Corporation (Japan), Japan Synchrotron Radiation Research Institute, Shunan University, Tokushima College of Technology, Niigata University, Tokushima University

OpenAlex ID: A5113973386

Improvement of the fatigue strength of SUS304 austenite stainless steel using ultrasonic nanocrystal surface modification

2013 · Manabu Yasuoka, Pangpang Wang, et al. · Surface and Coatings Technology · 123

Residual stress and thermal stress observation in thin copper films

2004 · Takao Hanabusa, Kazuya Kusaka, et al. · Thin Solid Films · 63

Effect of input power on crystal orientation and residual stress in AlN film deposited by dc sputtering

2000 · K Kusaka, D Taniguchi, et al. · Vacuum · 60

Effect of sputtering gas pressure and nitrogen concentration on crystal orientation and residual stress in sputtered AlN films

2002 · K Kusaka, D Taniguchi, et al. · Vacuum · 54

Residual stress and in-situ thermal stress measurement of aluminum film deposited on silicon wafer

1996 · K. Kusaka, T. Hanabusa, et al. · Thin Solid Films · 36

Effects of nitrogen pressure and ion flux on the properties of direct current reactive magnetron sputtered Zr–N films

1995 · Shozo Inoue, Kikuo Tominaga, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 34

GaN films deposited by planar magnetron sputtering

2002 · T Kikuma, K Tominaga, et al. · Vacuum · 27

Residual stress in TiN film deposited by arc ion plating

1999 · Tatsuya Matsue, Takao Hanabusa, et al. · Thin Solid Films · 22

Abnormal residual stress state in ZnO films synthesized by planar magnetron sputtering system with two facing targets

1999 · Takao Hanabusa, Hiroyoshi Hosoda, et al. · Thin Solid Films · 21

Effect of external magnetic field on c -axis orientation and residual stress in AlN films

1998 · Kazuya Kusaka, Takahiro Ao, et al. · Thin Solid Films · 19

TiN films prepared by unbalanced planar magnetron sputtering under control of photoemission of Ti

1996 · Kikuo Tominaga, Shozo Inoue, et al. · Thin Solid Films · 18

Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr

2002 · Kikuo Tominaga, Takuya Kikuma, et al. · Vacuum · 16

Effect of nitrogen gas pressure on residual stress in A1N films deposited by the planar magnetron sputtering system

1996 · Kazuya Kusaka, Takao Hanabusa, et al. · Thin Solid Films · 15

Effect of substrate temperature on crystal orientation and residual stress in radio frequency sputtered gallium–nitride films

2004 · Kazuya Kusaka, Takao Hanabusa, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 13

Effect of heating on the residual stresses in TiN films investigated using synchrotron radiation

2008 · Tatsuya Matsue, Takao Hanabusa, et al. · Vacuum · 11

Evaluation of Internal Stresses in Single-, Double- and Multi-Layered TiN and TiAlN Thin Films by Synchrotron Radiation

2004 · Takao HANABUSA, Kazuya KUSAKA, et al. · JSME International Journal Series A · 11

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Measurement of crystal orientation and residual stress in GaN film deposited by RF sputtering with powder target

2004 · K. Kusaka, T. Hanabusa, et al. · Vacuum · 10

Alteration of internal stresses in SiO2/Cu/TiN thin films by X-ray and synchrotron radiation due to heat treatment

2006 · Tatsuya Matsue, Takao Hanabusa, et al. · Vacuum · 9

Formation of Ultra-High-Density Ferromagnetic Column Arrays Beyond 1 Tera/inch2 Using Porous Alumina Template

2004 · Tomohiro Shimizu, Mamoru Nagayanagi, et al. · Transactions of the Magnetics Society of Japan · 9

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Evaluation of internal stresses in TiN thin films by synchrotron radiation

2004 · T. Hanabusa, K. Kusaka, et al. · Vacuum · 8

Gas Pressure Dependence of AlN Film Properties in Alternating Sputtering System

1996 · Kikuo Tominaga, Takahiro Ao, et al. · Japanese Journal of Applied Physics · 8

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Film Degradation in AlN Preparation by Facing Target System

1994 · Kikuo Tominaga, Kazuya Kusaka, et al. · Japanese Journal of Applied Physics · 8

Dependence of Substrate and Its Temperature on Residual Stress in AlN Films Deposited by Sputtering.

1993 · Takao HANABUSA, Kazuya KUSAKA, et al. · Journal of the Society of Materials Science Japan · 8

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Influence of Alkali Concentration on Morphology and Tensile Properties of Abaca Fibers

2015 · Ming Cai, Hitoshi Takagi, et al. · Advanced materials research · 7

Deposition of Photocatalytic TiO2 Films by Planar Magnetron Sputtering System with Opposed Ti Targets

2009 · Kikuo Tominaga, Kenji Okada, et al. · e-Journal of Surface Science and Nanotechnology · 7

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Works count: 116

Citation count: 664

H-index: 13

I10-index: 17