Product
Help
Pricing
About
Jobs
Log in
Get started
Author
Add to collection
Chihaya Mukaide
Observed name:
Mukaide, Chihaya
Institution:
Institute of Science Tokyo
Observed institution:
Institute of Science Tokyo
OpenAlex ID:
A5116739341
Design and evaluation of a dual-detection range single-axis MEMS capacitive accelerometer with gold proof-mass structure for suppressed warpage
2025
·
Devi Srujana Tenneti
, Chihaya Mukaide
, et al.
·
Japanese Journal of Applied Physics
·
6
Miniaturization of Highly Sensitive Single-Axis Gold Proof-mass MEMS Accelerometer for Wearable Device
2026
·
Torauto Yamada
, Chihaya Mukaide
, et al.
·
International Conference on Solid State Devices and Materials (SSDM)
Miniaturization of Highly Sensitive Single-Axis Gold Proof-mass MEMS Accelerometer for Wearable Device
2026
·
山田, 虎人
, Yamada, Torauto
, et al.
·
Institutional Repositories DataBase (IRDB)
高感度静電容量型 Mems 加速度センサのための九十九折ばね解析モデルの提案
2026
·
高畑, 寿志
, 栗岡, 智行
, et al.
·
Institutional Repositories DataBase (IRDB)
Geometric Effects on the Mechanical Characteristics of Ti/Au Multi-layered Serpentine Springs toward MEMS Applications
2026
·
高畑, 寿志
, 栗岡, 智行
, et al.
·
Institutional Repositories DataBase (IRDB)
Miniaturization of High-Sensitivity Gold Single-axis MEMS Accelerometer by Adjusting Spring Constant and Hole Size of Perforated Proof-mass
2026
·
山田, 虎人
, Yamada, Torauto
, et al.
·
Institutional Repositories DataBase (IRDB)
Analytical Modeling of Serpentine Spring for Gold Proof-mass Single-axis MEMS Accelerometer
2026
·
高畑, 寿志
, Takahata, Hisashi
, et al.
·
Institutional Repositories DataBase (IRDB)
Detection Characteristics in Wide Range Gold Proof-Mass Single-Axis MEMS Capacitive Accelerometer and Its Application
2026
·
向出, 千隼
, Mukaide, Chihaya
, et al.
·
Institutional Repositories DataBase (IRDB)
A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-mass Structures
2026
·
Torauto Yamada
, Chihaya Mukaide
, et al.
·
IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-Mass Structures
2026
·
山田, 虎人
, Yamada, Torauto
, et al.
·
Institutional Repositories DataBase (IRDB)
ワイドレンジAu錘1軸MEMS加速度センサにおける検出範囲の検討
2026
·
向出, 千隼
, Mukaide, Chihaya
, et al.
·
Institutional Repositories DataBase (IRDB)
Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価
2026
·
高畑, 寿志
, 栗岡, 智行
, et al.
·
Institutional Repositories DataBase (IRDB)
長期振動試験によるAu錘1軸MEMS加速度センサの耐久性評価
2026
·
山田, 虎人
, Yamada, Torauto
, et al.
·
Institutional Repositories DataBase (IRDB)
円形金錘1軸静電容量型mems加速度センサの構造とデバイス特性評価
2026
·
奥村, 雅子
, Okumura, Masako
, et al.
·
Institutional Repositories DataBase (IRDB)
Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing
2024
·
TENNETI, DEVI
, Tenneti, Devi.Srujana
, et al.
·
Institutional Repositories DataBase (IRDB)
Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing
2024
·
御宿, 希祐
, Miyado, Kisuke
, et al.
·
Institutional Repositories DataBase (IRDB)
Show more works
View as search
Works count:
17
Citation count:
6
H-index:
1
I10-index:
Year
Topic
Type
