Get started
Author

Zhang Lei

Observed institution: GlobalFoundries (Singapore)
OpenAlex ID: A5138301902
Study on Si-contamination in Developable BARC (DBARC) in High-K Metal Gate Process
2026 · Wu Wenbin, Zhang Lei, et al. · ASMC proceedings
Works count: 1
Citation count:
H-index:
I10-index:
Year
Topic
Type