V. Nazmov
Author
Alternate names V. Naz’mov, V. P. Naz'mov, V. P. Nazmov, Vladimir P. Naz'mov, Vladimir P. Nazmov +6 more
Institutions Budker Institute of Nuclear Physics, Institute of Solid State Chemistry and Mechanochemistry
Past institutions Budker Institute of Nuclear Physics, Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch of the Russian Academy of Sciences, Boreskov Institute of Catalysis, Karlsruhe Institute of Technology +4 more
ORCID: Yes
H-index: 16
I10-index: 28
Works count: 120
Citations count: 928
Soft X-ray lithography of high aspect ratio SU8 submicron structures
2008 · E. Reznikova, J. Mohr, et al. · Microsystem Technologies
Kinoform X-ray lens creation in polymer materials by deep X-ray lithography
2003 · V. Nazmov, L. Shabelnikov, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers
2004 · V. Nazmov, E. Reznikova, et al. · Microsystem Technologies