Keyword

electrostatic actuators

Description: Devices that produce mechanical motion or force through electrostatic attraction, often used in microelectromechanical systems and precision control.

Primary topic: Advanced MEMS and NEMS Technologies (58%)

OpenAlex ID: keywords/electrostatic-actuators

Electrostriction of polymer dielectrics with compliant electrodes as a means of actuation

1998 · Ronald E. Pelrine, Roy D. Kornbluh, et al. · Sensors and Actuators A Physical · 1,361

Artificial Muscles: Mechanisms, Applications, and Challenges

2017 · Seyed M. Mirvakili, Ian W. Hunter · Advanced Materials · 1,078

Hydraulically amplified self-healing electrostatic actuators with muscle-like performance

2018 · E. Acome, S. K. Mitchell, et al. · Science · 1,068

Ink-jet printed nanoparticle microelectromechanical systems

2002 · S.B. Fuller, E.J. Wilhelm, et al. · Journal of Microelectromechanical Systems · 594

ElectroMechanical Film (EMFi) — a new multipurpose electret material

2000 · Mika Paajanen, Jukka Lekkala, et al. · Sensors and Actuators A Physical · 287

Electrostatic Comb Drive Levitation And Control Method

1992 · W.C. Tang, M.G. Lim, et al. · Journal of Microelectromechanical Systems · 285

Multimode Hydraulically Amplified Electrostatic Actuators for Wearable Haptics

2020 · Edouard Leroy, Ronan Hinchet, et al. · Advanced Materials · 272

A comparison of muscle with artificial actuators

2003 · I.W. Hunter, S. Lafontaine · 263

Technologies for Cofabricating MEMS and Electronics

2008 · G.K. Fedder, R.T. Howe, et al. · Proceedings of the IEEE · 250

Electrostatic curved electrode actuators

1997 · R. Legtenberg, J. Gilbert, et al. · Journal of Microelectromechanical Systems · 247

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A methodology and model for the pull-in parameters of electrostatic actuators

2001 · Y. Nemirovsky, O. Bochobza-Degani · Journal of Microelectromechanical Systems · 234

Design considerations for a practical electrostatic micro-motor

1987 · W.S.N. Trimmer, K.J. Gabriel · Sensors and Actuators · 229

Design of large deflection electrostatic actuators

2003 · J.D. Grade, H. Jerman, et al. · Journal of Microelectromechanical Systems · 226

Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer

2002 · Li-Anne Liew, Yiping Liu, et al. · Sensors and Actuators A Physical · 199

Electro-ribbon actuators and electro-origami robots

2018 · Majid Taghavi, Tim Helps, et al. · Science Robotics · 197

Microelectromechanical deformable mirrors

1999 · T.G. Bifano, J. Perreault, et al. · IEEE Journal of Selected Topics in Quantum Electronics · 179

Design, fabrication, and operation of submicron gap comb-drive microactuators

1992 · T. Hirano, T. Furuhata, et al. · Journal of Microelectromechanical Systems · 177

A variable optical attenuator based on silicon micromechanics

1999 · C. Marxer, P. Griss, et al. · IEEE Photonics Technology Letters · 174

Solar powered 10 mg silicon robot

2003 · S. Hollar, A. Flynn, et al. · 172

A review on actuation and sensing techniques for MEMS-based microgrippers

2017 · Sijie Yang, Qingsong Xu · Journal of Micro-Bio Robotics · 169

Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens

1999 · H. Kahn, R. Ballarini, et al. · Proceedings of the Royal Society A Mathematical Physical and Engineering Sciences · 169

Fracture toughness of polysilicon MEMS devices

2000 · H. Kahn, N. Tayebi, et al. · Sensors and Actuators A Physical · 165

Numerical and analytical study on the pull-in instability of micro-structure under electrostatic loading

2006 · Yin Zhang, Ya-pu Zhao · Sensors and Actuators A Physical · 161

Micro-discharge and electric breakdown in a micro-gap

2000 · Takahito Ono, Dong Youn Sim, et al. · Journal of Micromechanics and Microengineering · 153

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Fast-scanning two-photon fluorescence imaging based on a microelectromechanical systems two- dimensional scanning mirror

2006 · Wibool Piyawattanametha, Robert P. J. Barretto, et al. · Optics Letters · 151

Works count: 2,520

Citation count: 27,880