Keyword

ion sputtering

Description: A surface-processing phenomenon in which energetic ions eject atoms or molecules from a material, studied in materials science and plasma physics.

Primary topic: Ion-surface interactions and analysis (41%)

OpenAlex ID: keywords/ion-sputtering

Energy dependence of the ion-induced sputtering yields of monatomic solids

1984 · Noriaki Matsunami, Yasunori Yamamura, et al. · Atomic Data and Nuclear Data Tables · 805

Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering

1999 · S. Facsko, T. Dekorsy, et al. · Science · 799

Energy Dependence of Ion-induced Sputtering Yields From Monatomic Solids at Normal Incidence

1996 · YASUNORI YAMAMURA, HIRO TAWARA · Atomic Data and Nuclear Data Tables · 772

Work function of indium tin oxide transparent conductor measured by photoelectron spectroscopy

1996 · Y. Park, V. Choong, et al. · Applied Physics Letters · 690

Ion Bombardment of Solids

1968 · L.N. Large · Electronics and Power · 571

Dynamic Scaling of Ion-Sputtered Surfaces

1995 · Rodolfo Cuerno, Albert-László Barabási · Physical Review Letters · 513

Morphology of ion-sputtered surfaces

2002 · Maxim A. Makeev, Rodolfo Cuerno, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 504

Nanostructuring surfaces by ion sputtering

2002 · U Valbusa, C Boragno, et al. · Journal of Physics Condensed Matter · 449

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Roughening instability and evolution of the Ge(001) surface during ion sputtering

1994 · E. Chason, T. M. Mayer, et al. · Physical Review Letters · 357

Local atomic and electronic structure of oxide/GaAs and SiO2/Si interfaces using high-resolution XPS

1979 · F. J. Grunthaner, P. J. Grunthaner, et al. · Journal of Vacuum Science and Technology · 334

Roughness Evolution of Ion Sputtered Rotating InP Surfaces: Pattern Formation and Scaling Laws

2000 · F. Frost, A. Schindler, et al. · Physical Review Letters · 323

Roughening instability and ion-induced viscous relaxation of SiO2 surfaces

1994 · T. M. Mayer, E. Chason, et al. · Journal of Applied Physics · 303

Quantitative depth profiling in surface analysis: A review