Keyword

MEMS

Description: MEMS are micro-electromechanical systems: miniature devices integrating mechanical and electronic components, used in sensing, actuation, and other technologies.

Primary topic: Advanced MEMS and NEMS Technologies (49%)

Wikidata ID: wiki/Q175561

OpenAlex ID: keywords/mems

Topology Optimization: Theory, Methods, and Applications

2011 · Martin P. Bendsøe, Ole Sigmund · 5,694

Soft Lithography

1998 · Younan Xia, George M. Whitesides · Annual Review of Materials Science · 4,614

Silicon as a mechanical material

1982 · K.E. Petersen · Proceedings of the IEEE · 2,921

A systematic review of the associations between dose regimens and medication compliance

2001 · Ami J. Claxton, Joyce Cramer, et al. · Clinical Therapeutics · 2,386

Fundamentals of Microfabrication

2018 · Marc J. Madou · CRC Press eBooks · 2,020

Fundamentals of microfabrication : the science of miniaturization

2002 · Marc Madou · 1,589

Nanoelectromechanical Systems

2000 · H. G. Craighead · Science · 1,444

A Review of Power Harvesting from Vibration Using Piezoelectric Materials

2004 · Henry A. Sodano, Daniel J. Inman, et al. · The Shock and Vibration Digest · 1,361

Micro-electro-mechanical-systems (mems) and Fluid Flows

1998 · Chih-Ming Ho, Yu-Chong Tai · Annual Review of Fluid Mechanics · 1,254

Micromachined Transducers Sourcebook

1998 · G.T.A. Kovacs · 1,199

Cantilever transducers as a platform for chemical and biological sensors

2004 · Nickolay V. Lavrik, Michael J. Sepaniak, et al. · Review of Scientific Instruments · 1,120

Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges

2003 · Markku Leskelä, Mikko Ritala · Angewandte Chemie International Edition · 1,110

A review of piezoelectric polymers as functional materials for electromechanical transducers

2014 · Khaled S Ramadan, D Sameoto, et al. · Smart Materials and Structures · 1,060

Thin Film Piezoelectrics for MEMS

2004 · S. Trolier-McKinstry, P. Muralt · Journal of Electroceramics · 1,026

Review: Semiconductor Piezoresistance for Microsystems

2009 · A.A. Barlian, W.-T. Park, et al. · Proceedings of the IEEE · 953

Handbook of micro/nano tribology

1995 · Bharat Bhushan · CRC Press eBooks · 933

A survey on deep learning tools dealing with data scarcity: definitions, challenges, solutions, tips, and applications

2023 · Laith Alzubaidi, Jinshuai Bai, et al. · Journal Of Big Data · 914

PDF

On energy harvesting from ambient vibration

2005 · N.G. Stephen · Journal of Sound and Vibration · 879

Distributed control of spatially invariant systems

2002 · B. Bamieh, F. Paganini, et al. · IEEE Transactions on Automatic Control · 856

MEMS Linear and Nonlinear Statics and Dynamics

2011 · Mohammad I. Younis · Microsystems · 852

Role of material microstructure in plate stiffness with relevance to microcantilever sensors

2005 · Andrew W McFarland, Jonathan S Colton · Journal of Micromechanics and Microengineering · 822

PDF

The MEMS Handbook

2001 · Mechanical engineering series · 795

Laterally Driven Polysilicon Resonant Microstructures

1989 · William C. Tang, Tu-Cuong H. Nguyen, et al. · Sensors and Actuators · 754

Mechanical-thermal noise in micromachined acoustic and vibration sensors

1993 · T.B. Gabrielson · IEEE Transactions on Electron Devices · 745

Progress in Piezotronics and Piezo‐Phototronics

2012 · Zhong Lin Wang · Advanced Materials · 735

Works count: 29,450

Citation count: 285,100